silicon germanium growth

Germanium wrap-around photodetectors on …

We present a novel waveguide coupling scheme where a germanium diode grown via rapid melt growth is wrapped around a silicon waveguide. A 4 fF PIN photodiode is demonstrated with 0.95 A/W responsivity at …

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Growth, Defect Formation, and Morphology Control …

We demonstrate germanium–silicon axial NW heterostructure growth by the VLS method with composition modulation and use these structures as a platform to understand how …

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Low temperature, high growth rate epitaxial silicon and silicon

Epitaxial growth of silicon and silicon germanium alloy films on Si(1 0 0) substrates in an ASM Epsilon ® single wafer reactor system using trisilane and germane has been investigated. The results obtained reveal that it is possible to achieve epitaxial silicon and silicon germanium growth rates at 630. °C and below that are substantially …

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Loading Effect of Selective Epitaxial Growth of Silicon Germanium …

At relatively low growth temperatures, such as 700 °C for germanium and 1100 °C for silicon, the material deposited uniformly over the water surface and was single crystal in the holes in the ...

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Germanium epitaxy on silicon

Epitaxial growth of germanium on silicon or silicon-on-insulator (SOI) substrates will result in two-dimensional (2D) planar films or zero-dimensional quantum dots (QDs), depending on different growth mechanisms. The precise growth of SiGe on a surface is complicated, determined by material parameters and growth conditions, such …

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Silicon–Germanium: properties, growth and …

The growth of silicon–germanium is considered, with particular emphasis on the chemical vapour deposition technique and selective epitaxy. Finally, the properties of …

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Growth, structural, and electrical properties of germanium …

Growth, structural, and electrical properties of germanium- on -silicon heterostructure by molecular beam epitaxy. Aheli Ghosh; Michael B. Clavel ; Peter D. …

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Silicon-Germanium: Properties, Growth and …

The key benefit of silicon-germanium is its use in combination with silicon to produce a heterojunction. Strain is incorporated into the silicon-germanium or the silicon during …

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The growth and structure of eutectics with silicon and germanium

THE OF GROWTH AND STRUCTURE EUTECTICS WITH SILICON AND GERMANIUM A. Hellawell Department of Metallurgy, Oxford University I. INTRODUCTION Although much pure and applied research has been directed towards understanding and controlling the structure of eutectic alloys, there are still only two alloy systems in which …

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Selective epitaxial growth using dichlorosilane and silane by …

Selective epitaxial growth of silicon and silicon germanium by chemical vapor deposition (CVD) has tremendous potential for the fabrication of advanced submicron devices, including heterojunction bipolar transistors [1] and elevated source-drain MOSFETs [2]. Epitaxial CVD processes have been reported with use of a variety of gas chemistries.

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Growth and characterization of germanium epitaxial film on silicon …

Direct growth of Ge on Si is usually achieved in ultra-high vacuum chemical vapour deposition (UHV-CVD) 14–16 or reduced pressure chemical vapour deposition (RPCVD). 17–19 The main disadvantage of using these two methods is the inability to deposit the subsequent III-V materials (which can be grown in MOCVD) without breaking …

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Revealing atomistic mechanisms of gold-catalyzed …

germanium (Au-Ge) phase diagram, we performed molecular dynamics simulations for a systematic investigation on the Au-catalyzed growth process of Ge crystals. From the simulations, relationships were established between the overall Ge growth rate and several main synthesis conditions, including substrate crystallographic orientation,

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Introduction to Silicon-Germanium (SiGe) Technology

Overview of Silicon-Germanium (SiGe) Technology and Historical Development Shockley's early transistor game most likely inspired the notion of fusing silicon (Si) and germanium (Ge) to create an alloy for use in transistor engineering. However, this concept has just become a reality in the last 15 years due to the challenges associated with …

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481 Silicon–Germ Properties, Growth and Applications …

The growth of silicon–germanium is considered, with partic-ular emphasis on the chemical vapour deposition technique and selective epitaxy. Finally, the prop-erties of polycrystalline silicon–germanium are discussed in the context of its use as a gate material for MOS transistors.

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Silicon-Germanium: Properties, Growth and Applications

The growth of silicon-germanium is considered, with particular emphasis on the chemical vapour deposition technique and selective epitaxy. Finally, the properties of polycrystalline silicon ...

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Growth, structural, and electrical properties of germanium-on-silicon

The growth, morphological, and electrical properties of thin-film Ge grown by molecular beam epitaxy on Si using a two-step growth process were investigate ... Mantu K. Hudait; Growth, structural, and electrical properties of germanium-on-silicon heterostructure by molecular beam epitaxy. AIP Advances 1 September 2017; 7 (9): …

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Growth of silicon based germanium tin alloys

Abstract. Germanium tin (GeSn) is under equilibrium a two phase (Ge + Sn) system. Single phase GeSn alloys are important for silicon based heterostructure devices as stressors for Ge channels and as candidates for direct/indirect band cross-over. Such alloys would allow superior Ge channel metal oxide semiconductor devices and …

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Crystal Growth for Silicon & Germanium – Lattice Materials

Lattice Materials can grow greater than 13″ polycrystalline silicon and up to 12.5″ (12″ slip free) monocrystalline silicon. We also commonly source larger diameter germanium and silicon ingots, over 17″. Silicon Czochralski Crystal Growth: Monocrystalline: up to 12.5" Diameter. Polycrystalline: greater than 13" Diameter.

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Silicon, Germanium, and Their Alloys | Growth, Defects, …

ABSTRACT. Despite the vast knowledge accumulated on silicon, germanium, and their alloys, these materials still demand research, eminently in view of the improvement of knowledge on silicon-germanium alloys and the potentialities of silicon as a substrate for high-efficiency solar cells and for compound semiconductors and the …

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Reducing Merged Silicon-Germanium (SiGe) Epitaxial Growth …

In this paper, one unique defect of "Merged EPI" seen in the process of selective epitaxial growth of silicon-germanium (SiGe) on source/drain (S/D) regions was found to be closely related to the formation of holes in the source/drain regions. These holes cause back fill of gate metal materials and defect limited yield loss.

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Silicon-germanium Semiconductors Market Size, Dynamics …

What is the current size and growth potential of the Silicon-germanium Semiconductors Market? Answer: Silicon-germanium Semiconductors Market is expected to growing at a CAGR of XX% from 2024 to ...

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Next Generation Device Grade Silicon-Germanium on …

3 Altmetric. Metrics. High quality single crystal silicon-germanium-on-insulator has the potential to facilitate the next generation of photonic and electronic devices. Using a rapid melt growth ...

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Silicon, Germanium, and Their Alloys: Growth, Defects

Despite the vast knowledge accumulated on silicon, germanium, and their alloys, these materials still demand research, eminently in view of the improvement of knowledge on silicon–germanium alloys and the potentialities of silicon as a substrate for high-efficiency solar cells and for compound semiconductors and the ongoing development of …

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Process Steps for High Quality Si-Based Epitaxial Growth at …

1. Introduction. The epitaxial growth of silicon, silicon-germanium (SiGe) layers on a silicon substrate is a well-established technology for semiconductor fabrication, and has long been applied to the production of high-performance image sensors [] and power devices [].Moreover, the addition of phosphorus or boron precursors along with …

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Silicon-Germanium Carbon Alloys: Growth, Properties and …

Carbon (C) and Silicon Germanium (SiGe) work like a magic sauce. At least in small concentrations, they make everything taste better. It is remarkable enough that SiGe, a new material, and the heterobipolar transistor, a new device, appear on the brink of impacting the exploding wireless market. The addition of C to SiGe, albeit in small concentrations, …

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Silicon-Germanium: Properties, Growth and Applications

The growth of silicon-germanium is considered, with particular emphasis on the chemical vapour deposition technique and selective epitaxy. Finally, the properties of polycrystalline silicon-germanium are discussed in the context of …

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Next Generation Device Grade Silicon-Germanium …

A complementary technique for fabricating localized SGOI regions on a Si wafer is rapid melt growth (RMG). RMG, also referred to as liquid phase epitaxy (LPE), …

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Silicon, Germanium, and Their Alloys | Growth, …

Growth and Characterization of Silicon–Germanium Alloys. Abstract. chapter 3 | 26 pages. Germanium on Silicon: Epitaxy and Applications. Abstract. chapter …

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GROWTH OF GERMANIUM QUANTUM DOTS ON …

unexpected effects during epitaxy in the germanium/silicon system [4, 5]. Of particular interest is the growth of germanium on the oxidized silicon surface [6–8]. It is in this system that islands with a record (extremely) high density of up to 1012–1013 cm–2 and sizes less than 10 nm were obtained [8].

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Temperature control of silicon-germanium alloy …

temperature of silicon wafers during the growth of silicon-germanium alloy heteroepitaxial layers in a rapid thermal processing system. The silicon-germanium alloy layers have negligible absorption at 1.3 and 1.55 pm over wide ranges of thickness, composition, and strain condition.

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Selective area growth of germanium and …

The ability to selectively grow germanium in specific regions of a silicon substrate is highly desirable for the future integration of Ge-based optoelectronice devices with high-speed …

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Growth of Silicon-Germanium Alloys

The Silicon-Germanium alloys (Si80Ge20) are used in several applications, monocrystallyne as well as polycrystalline, in advanced electronic and optoelectronic devices, and mainly for radioisotope thermoelectric generators (RTG) for energy conversion by thermoelectrical effects. In this work the Si:Ge alloys are grown by the Czochralski ...

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